位相型厚全息光栅及应用研究

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3.0 赵德峰 2024-11-19 4 4 6.85MB 136 页 15积分
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ii
衍射光栅是现代光学技术中的重要光学器件，它的应用遍及光学技术的各个
研究领域。如果位相型全息光栅的衍射效率特性必须用矢量理论分析，这一类光
栅称为位相型厚全息光栅。由于该类光栅应用极其广泛，对它们的制作方法研究
和衍射特性分析具有十分重要的意义。本文的厚全息光栅包括折射率调制型位相
光栅、介质膜基底的浮雕型光栅掩膜和由象素光栅组成的随机位相光栅，论文在
理论和实验制作方法上对这三类光栅进行了深入研究。
利用平行条纹面的非均匀双波耦合波理论，结合实验测量结果，提出了平行
条纹面反射体全息的折射率非均匀模型，为反射体全息窄带带阻滤光片奠定了理
论基础。分析对比了全息体光栅在 Bragg 条件和偏离 Bragg 条件下的 Kogelnik 双
波耦合理论与严格耦合波理论的计算结果，给出双波耦合波理论的近似条件。
实验制作了介质膜光栅光刻胶掩膜，刻蚀结果表明，掩膜达到设计质量要求，
为用于惯性约束核聚变（ICF）的脉冲压缩光栅制作打下了实验基础。分析了大面
积光栅掩膜的技术难点，对长时间全息曝光时全息系统的稳定性作了详细分析，
并设计制作了条纹锁定系统。理论上给出了光栅的衍射波象差与记录光学系统波
象差的关系，设计分析了用于全息记录的大口径光学系统。
理论和实验上对平行条纹面的反射体全息进行了系统研究，利用非均匀折射
率调制度模型分析了反射体全息的光谱衍射特性，实验上探讨了记录介质重铬酸
明胶工艺条件与衍射特性的对应关系，实验上制作了全息窄带带阻滤光片，设计
并实验制作了汽车全息平显装置。
用统计光学理论分析了用象素全息技术制作的定向随机位相板的衍射场特
性，用严格耦合波理论分析了浮雕结构随机位相板的衍射效率特性，给出了这一
衍射元件的设计方法并在实验上进行了验证。实验制作了象素全息制作的核心元
件——对称分束体全息光栅，用严格耦合波理论分析了这类光栅的衍射特性，这
一分析对体分束光栅的制作具有指导意义。理论上提出了用定向随机位相板检测
光学表面面形的方法，提供了一种检测大面积光学元件表面面形的技术方案。
关键词：衍射光栅 耦合波理论 脉冲压缩光栅 全息带阻滤光片 平视
显示 象素全息
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ABSTRACT
Diffraction gratings, which are applied in various areas of optical technology, are
important optical elements for modern optics. A type of holographic gratings, which
diffraction specialities are analyzed with vector theory, is called phase thick holographic
grating (PTHG). The study on the fabricating method and diffraction specialty are very
significative as a result of wide applications of the PTHG. The PTHGs in this paper
include refractive index modulation grating, grating mask on multilayer stacks and
random phase grating composed with pixel gratings. The theory and experiment
research on the three types of grating are carried out in this paper.
A refractive index non-uniformity model of reflective hologram in which the fringe
plans are parallel to the surface of recording medium is proposed according to the
non-uniform couple-wave theory and the experimental measure results. The model is a
theoretical basis for holographic notch filter. The rigorous couple-wave theory and
Kogelnik couple-wave theory are compared under Bragg condition and deviating Bragg
condition. The approximate conditions of Kogelnik’s theory are given.
The photoresist grating mask on multilayer stacks is fabricated successfully. The
etching results indicate that the mask can satisfy the etching desires. The making mask
and etching experiments establish basis fabricating pulse compression grating, which
are used inertial confinement fusion (ICF). Stability of holographic system of long
exposing time is analyzed, and fringe-locking system is established. The relationship
between diffraction wavefront aberration and recording optical system is given. A
large-scale collimation system is designed.
Reflective holograms which fringe plans are parallel to the recording medium surface
are researched on theory and experiment. According to the nonuniform model of
refraction index modulation, the spectrum speciality is studied. The relationship
between the technics of dichromatic gelatin and the spectrum speciality is shown.
Holographic notch filter and automobile head up display are fabricated.
The diffraction field of directional random phase scatterer (DRPS) composed of pixel
gratings is analyzed with statistical optics. The diffraction efficiency analysis to DRPS
with rigorous couple-wave theory is shown. The design method of DRPS is given and is
validated. A volume grating splitting beam symmetrically, a primary element forming
pixel gratings, is fabricated, and its diffraction efficiency calculation is presented. A
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method for detecting optical surface with DRPS is proposed theoretically, which is
applicable to large-scale optical elements.
Key Words: Diffraction grating, couple-wave theory, pulse compress
grating, holographic notch filter, head-up display, pixel holography
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目 录
摘要
ABSTRACT
第一章 引言 .....................................................................................................................1
参考文献 .......................................................................................................................4
第二章 位相型厚全息光栅耦合波理论 .........................................................................5
§2.1 光栅电磁场理论概述 .......................................................................................... 5
§2.2 在周期介质中的麦克斯韦方程 .......................................................................... 7
§2.3 浮雕型光栅的严格耦合波理论（RCW）......................................................... 9
§2.4 体反射全息的非均匀耦合波理论 .................................................................... 12
§2.4.1 非均匀体全息的耦合波方程......................................................................12
§2.4.2 折射率调制度和空间频率变化分布..........................................................15
§2.5 折射率调制型透射光栅的严格耦合理论 ........................................................ 18
§2.5.1 折射率调制型体光栅的严格耦合波理论..................................................18
§2.5.2 Bragg 条件下严格耦合波理论和 Kogelnikh 理论的比较 ........................21
§2.5.3 偏离 Bragg 条件下严格耦合波理论和 Kogelnik 理论的比较.................25
参考文献 .....................................................................................................................31
第三章 大口径脉冲压缩全息光栅掩膜 .......................................................................35
§3.1 引言 .................................................................................................................... 35
§3.2 介质膜脉冲压缩光栅原理和技术要求 ............................................................ 37
§3.2.1 光栅对脉冲压缩原理..................................................................................37
§3.2.2 介质膜光柵的结构和工艺原理...................................................................38
§3.2.3 脉冲压缩光栅光刻胶掩膜技术指标..........................................................42
§3.2.4 大口径脉冲压缩光栅关键技术..................................................................45
§3.3 全息台的稳定性 ................................................................................................ 46
§3.3.1 激光器与全息台分离结构的稳定性分析..................................................46
§3.3.2 全息记录的条纹锁定系统..........................................................................48
§3.3.3 透射元件的不稳定性对全息记录稳定性的影响......................................50
§3.4 大口径光栅曝光光学系统设计 ........................................................................ 53
§3.4.1 全息光栅波象差与记录光学系统关系......................................................53
§3.4.2 单光学元件光学系统..................................................................................54
§3.4.3 含补偿器的平凸透镜系统..........................................................................59
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§3.4.4 系统调节和检测..........................................................................................67
§3.4.5 大口径透镜装架形变对波象差的影响......................................................68
§3.4.6 小结..............................................................................................................70
§3.5 全息光刻胶掩膜制作 .........................................................................................71
§3.5.1 光刻胶掩膜的技术要求..............................................................................71
§3.5.2 光刻胶涂布..................................................................................................71
§3.5.3 光刻胶掩膜工艺研究..................................................................................73
§3.5.4 实验结果......................................................................................................77
参考文献 .....................................................................................................................79
第四章 体反射全息光栅 ...............................................................................................81
§4.1 非均匀体反射全息的制作及衍射特性 .............................................................81
§4.1.1 反射全息的测试...........................................................................................81
§4.1.2 反射全息光学元件制作..............................................................................82
§4.2 反射全息滤光片 .................................................................................................86
§4.2.1 窄带滤光片折射率调制度特性...................................................................86
§4.2.2 窄带滤光片的制作和实验结果分析...........................................................91
§4.3 汽车平显系统 .................................................................................................... 92
参考文献 .....................................................................................................................94
第五章 象素全息光栅 ...................................................................................................97
§5.1 象素全息光栅制作 ............................................................................................ 97
§5.1.1 象素全息光栅的制作方法..........................................................................97
§5.1.2 象素全息图的设计......................................................................................98
§5.1.3 体全息分束器设计与制作........................................................................100
§5.2 象素全息光栅衍射场特性 .............................................................................. 103
§5.2.1 一维象素随机光栅的散射特性................................................................103
§5.2.2 有空频和倾角变化的象素随机光栅的散射特性....................................107
§5.3 定向随机位相散射板 ...................................................................................... 109
§5.3.1 定向随机位相散射板设计与制作............................................................109
§5.3.2 设计实例及实验结果................................................................................112
§5.3.3 定向随机位相散射板衍射效率分析........................................................113
§5.4 定向随机位相散射板应用——用定向位相散射板检测波象差 ...................118
§5.4.1 象素随机光栅散射板干涉仪测量系统....................................................118
§5.4.2 随机光栅散射板设计实例........................................................................120
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§5.4.3 随机光栅散射板干涉仪原理....................................................................121
§5.4.4 象素随机光栅散射板干涉仪特性分析....................................................125
参考文献 ...................................................................................................................127
第六章 结论 .................................................................................................................129
在读期间公开发表的论文和承担科研项目及取得成果 .......................................... 131
致 谢...........................................................................................................................133
摘要：

ii衍射光栅是现代光学技术中的重要光学器件，它的应用遍及光学技术的各个研究领域。如果位相型全息光栅的衍射效率特性必须用矢量理论分析，这一类光栅称为位相型厚全息光栅。由于该类光栅应用极其广泛，对它们的制作方法研究和衍射特性分析具有十分重要的意义。本文的厚全息光栅包括折射率调制型位相光栅、介质膜基底的浮雕型光栅掩膜和由象素光栅组成的随机位相光栅，论文在理论和实验制作方法上对这三类光栅进行了深入研究。利用平行条纹面的非均匀双波耦合波理论，结合实验测量结果，提出了平行条纹面反射体全息的折射率非均匀模型，为反射体全息窄带带阻滤光片奠定了理论基础。分析对比了全息体光栅在Bragg条件和偏离Bragg条件下...

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作者：赵德峰 分类：高等教育资料 价格：15积分 属性：136 页 大小：6.85MB 格式：PDF 时间：2024-11-19

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